Founded

MODEL			8’’ASR Single Arm	8’’ASR Dual Arm	12’’ASR Single Arm	12’’ASR Dual Arm
			ASR-2010-00	ASR-2020-00	ASR-3010-00	ASR-3020-00
Performance	Motion Range	R1,R2 axis (Extension)	567mm	567mm	730mm	730mm
		T axis (Rotation)	370deg	370deg	370deg	370deg
		Z axis (Up/down)	240mm	240mm	300/425mm	300/425mm
	MAX. Speed	R1,R2 axis (Extension)	800 mm/sec	800 mm/sec	800 mm/sec	800 mm/sec
		T axis (Rotation)	240 deg/sec	240 deg/sec	240 deg/sec	240 deg/sec
		Z axis (Up/down)	300 mm/sec	300 mm/sec	300 mm/sec	300 mm/sec
		X axis(Traverse) Optional	1000≤ mm/sec	1000≤ mm/sec	1000≤ mm/sec	1000≤ mm/sec
	Repeat-ability	R1,R2 axis (Extension)	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm
		T axis (Rotation)	≤ ±0.02deg	≤ ±0.02deg	≤ ±0.02deg	≤ ±0.02deg
		Z axis (Up/down)	≤ ±0.05mm	≤ ±0.05mm	≤ ±0.05mm	≤ ±0.05mm
		X axis(Traverse) Optional	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm
	MTBF		≥ 8000 hrs
	MTTR		≤ 2 hrs
General	Wafer Size		8 inch		12 inch
	Control Axis		3	4	3	4
	Arm Type		Single Arm	Dual Arm	Single Arm	Dual Arm
	Blade Thinkness		< 2.5mm		< 3mm
	Cleanliness		Class 1
	Load Capacity		1kg(Include Gripper)
	Weight		38 kg	42 kg	48 kg	52 kg
	Cable Length (Robot-Controller)		3m(Standard)
Utility	Power(Controller)		Signle Phase AC220±10%, 50/60Hz
	Air		More than 0.5MPa,¢ 6mm
	Vacuum		Less than -90kPa
Environment	Operating Temp		0-40°C