Founded

MODEL			Tele Single (2-step)	Tele Dual (2-step)	Tele Single (3-step)	Tele Dual (3-step)
			ASR-**10-20	ASR-**20-20	ASR-**10-30	ASR-3**20-30
Performance	Motion Range	R1,R2 axis (Extension)	567mm	567mm	730mm	730mm
		T axis (Rotation)	370deg	370deg	370deg	370deg
		Z axis (Up/down)	600mm	600mm	1200mm	1200mm
	MAX. Speed	R1,R2 axis (Extension)	800 mm/sec	800 mm/sec	800 mm/sec	800 mm/sec
		T axis (Rotation)	240 deg/sec	240 deg/sec	240 deg/sec	240 deg/sec
		Z axis (Up/down)	600 mm/sec	600 mm/sec	600 mm/sec	600 mm/sec
	Repeat-ability	R1,R2 axis (Extension)	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm
		T axis (Rotation)	≤ ±0.02deg	≤ ±0.02deg	≤ ±0.02deg	≤ ±0.02deg
		Z axis (Up/down)	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm	≤ ±0.1mm
	MTBF		≥ 8000 hrs
	MTTR		≤ 2 hrs
General	Wafer Size		8 -12 inch
	Control Axis		4	5	5	6
	Arm Type		Single Arm	Dual Arm	Single Arm	Dual Arm
	Blade Thinkness		< 3mm
	Cleanliness		Class 1
	Load Capacity		1kg(Include Gripper)
	Weight		60 kg	64 kg	80 kg	84 kg
	Cable Length (Robot-Controller)		3m(Standard)
Utility	Power(Controller)		Signle Phase AC220±10%, 50/60Hz
	Air		More than 0.4-0.5MPa,¢ 4mm
	Vacuum		Less than -50kPa
Environment	Operating Temp		0-40°C