Fortrend offers a range of EUV & 193 Reticle handling automation solutions to meet the evolving cleanliness standard’s demanded by today’s industry.
The Lamina 200 Series Sorter system offer solutions from transferring the Reticles from storage and shipping boxes to SMIF pods both in the Mask houses and FAB floors. The systems are built in a modular design to suit customer requirements. The transfer of Reticles is inside a ISO class 1 Mini-environment.
QC tool designed for mask houseISO Class 1 cleanlinessSupport Reticle SMIF POD, shipping and storage boxModular DesignVision system: Bright light Inspection Station (BLIS)Read station (Barcode,OCR, ID)ReticleScara Robot and Turn-Flip Robot