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SORTER/EFEM
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SORTER/EFEM
Lamina 202
Fortrend offers a range of EUV & 193 Reticle handling automation solutions to meet the evolving cleanliness standard’s demanded by today’s industry.
The Lamina 200 Series Sorter system offer solutions from transferring the Reticles from storage and shipping boxes to SMIF pods both in the Mask houses and FAB floors. The systems are built in a modular design to suit customer requirements. The transfer of Reticles is inside a ISO class 1 Mini-environment.
Consultation
Introduction
Specification
Other products
  • For the FAB Reticle room to automate the transfer of Reticles from Clam Shell shipping/storage boxes to SEMI E111 SMIF pods.
  • Transfer New Reticles from mask shop or storage to SMIF Pods
  • Return Reticles to mask shop or storage

 Improve productivity and Yield for the transferring of Masks to and from SMIF pods and shipping boxes with the Fortrend Lamina 202 Mask Sorter.
  • Transfer New Mask to shipping boxes for your customers.
  • Transfer customers returned masks to SMIF pods for processing.
  • Rotate or Flip Masks during manufacture or repair to orientate the masks in the SMIF pod ready for the next process.
  • PLUS 500 G4 SMIF Arm Load port for transferring Reticle to and from the Shipping box to SMIF Pod.
  • Integral Robot arm allows the mask rotated 90°, 180° or 270° and to Flip the mask over for correct orientations in the SMIF pod or Shipping Box.
  • SEMI E111 SMIF pod
  • TOPPAN, POZZETTA or DMS Clam Shell shipping openers
  • SEMI S2, S8, CE
  • ISO Class 1 cleanliness
  • Small foot print 24” (610mm) × 45” (1143mm) × 72” (1829mm)
Options:
 RFID Reader/Writer
 Bar code reader (1D &2D)
 SECS/GEM
 CIM connection
 GUI user interface
Product recommendation
PLM 150Rx
PLM 200Rx
PLM EUV Dual
PLUS 150 G4
PLUS 500 G4
POM 150R
POM 200R
Lamina 202
PLUS 150S-X/PLUS 500S-X
Lamina 203
PLUS 150CR-R/PLUS 500CR-R
Lamina 204
Lamina 206
PLUS 150CL-L/PLUS 500CL-L
PLUS 150R-X/PLUS 500R-X
Lamina 205
PLUS 150SD-X/PLUS 500SD-X
Dual Arms Scara Robot
300mm Lord Port
Turn Flip Robot
PLUS 150UX/PLUS 500UX
Lamina Series 150mm Sorter
2-3 Step Telescopic Robot
Lamina Series 200mm Sorter
Pre-Aligner
200mm-300mm AMR
PLM 200W
Single Arm Scara Robot
Lamina Series 300mm Sorter
200mm-300mm Stocker
Flip Pre-Aligner
PLUS 500F