Easy to Integrate
The fully automatic Fortrend Plus 500 R-X transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 500 R-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that rotates 350˚ offers angled cassette placement and small chamber space that cannot be accessed by any other existing SMIF solutions. Plus 500R model illustrates another engineering excellence of Fortrend products.
Simple to Maintain
All Plus 500 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.
Safe and Reliable
A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.
With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 500 R-X is the best choice for both OEMs and system integrators.
Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend’s expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.