ico408-734-9311
PLUS 150CL-L/PLUS 500CL-L
Compact Body//Straight arm Movement//Loads cassette to tool stage either wafer Horizontally or vertically
Slides the Cassette up to 80mm to the Left of Center//Wafer Mapper//Wafer protrusion sensor/Cassette Present Sensor/SMIF pod in place Sensors/SMIF pod Present Sensor//Info Pad Plugs//Left or Rear I/O panel//Tool Mount//Dust cover
Introduction
Specification
Other products

MODEL

PLUS 500CL-L

PLUS 500CL-L with E84

I/O Panel

Left

Left

E84 COMM Board

NO

YES

Dimensions

34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels)

Wheel Height

6 to 15.3 cm tool dependent

Cycle time (load)

55 sec. (CL Model without tilt and leave pod open after load)

Cycle time (Unload)

55 sec. (CL Model without tilt with pod left open after load)

 

 

Arm Extension

390mm

Arm Z Travel

40mm

Rail

Travel

80mm

to left

Power

100 to 240 VAC @

50/60 Hz

Weight

93 Kg (not including SMIF

pod)

Power-on reset

time

<20 Secs

SMIF Arm

Payload

3.2 Kg

Arm Extent axis

precision

±0.1 mm

Arm Elevator

axis precision

±0.1 mm

Gripper axis

precision

±0.5 mm

Tilt axis

precision

±0.15 degree

Control

Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant

Communication

Interface

RS232 (Serial) – Fortrend HEX or ASCII or SECS

Parallel I/O

Lot ID Reader

Options

IR (Smart) Tag – 8200 or 8400 series; Intellion Lot Track system

RFID Read/write Module – Fortrend or Hermos or Other RFID

Inquiry
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