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Reticle Automation

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PLM EUV Dual

ISO Class 1 cleanliness with active self-clean air flow design//Automatic unlocks and locks SMIF outer pod door//Lifts both inner and outer pod doors//Applies 80N force to Outer Pod door, per SEMI E152, during Unlocking and Locking of the Outer Pod door//Four programmable Interlock signals//Inner pod Present Sensor//Inner pod alignment sensors//Info Pad sensors detect Pod Type//Serial or Parallel, SECS optional.
//OHT Compatible//Optional RFID reader/writer//Optional Purge Available//Unlock/Locks Standard 200mm SEMI E100 Reticle SMIF Pods (RSP)

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lISO Class 1 cleanliness with active self-clean air flow design.
lAutomatic unlocks and locks SMIF outer pod door
lLifts both inner and outer pod doors.
lApplies 80N force to Outer Pod door, per SEMI E152, during Unlocking and Locking of the Outer Pod door.
lAll electrical system with field programmable application software
lFour programmable Interlock signals
lInner pod Present Sensor
lInner pod alignment sensors
lInfo Pad sensors detect Pod Type - RSP 200 or EUV Pod
lCommunication: Serial or Parallel, SECS optional.
lMeets SEMI E19.4, E84, E100, E117, E152, S2 and S8 standards and CE certified
lOHT Compatible
lOptional RFID reader/writer
lOptional Purge Available
lUnlock/Locks Standard 200mm SEMI E100 Reticle SMIF Pods (RSP)

Specifications:
Reticle size	152mm W x 152mm D x 6.35mm H
Dimension	363W x 420D x 700H mm
Elevator Stroke	240 mm
Load capacity	5.4kg
Pod Types	SEMI E152 RSP or E100 RSP
Pod interface	SEMI E19.4
Power requirement	100V/240VAC @ 1Amp 50/60Hz Or 24 VDC (Option)
Weight	23kg without Pod
Open Pod	< 5 seconds
Close Pod	< 5 seconds
MCBF	50,000 cycles
MTTR	< 1 hour
Pod PIP sensor	1 set
Communication	Parallel and/or Serial
Communication	EIA-RS232C(SECS I/II)