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POM 200R

An automated SMIF pod opener designed to open 200mm single and multiple reticle SMIF pods. After the pod cover is lifted, the reticles remain on the pod table that can be manipulated safely by operators. The POM is an all-electrical system for quick installation and removal. Substrate mapping technology protects against breakage during substrate handling operations. A reticle protrusion sensor with operational interlock prevents the pod from closing on protruding substrates.

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Introduction

Specification

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Fortrend POM-200R is an automated SMIF pod opener designed to open 200mm single and multiple reticle SMIF pods. After the pod cover is lifted, the reticles remain on the pod table that can be manipulated safely by operators. Designed for tabletop applications, the POM is an all-electrical system for quick installation and removal. An optional patented substrate mapping technology protects against breakage during substrate handling operations. A reticle protrusion sensor with operational interlock prevents the pod from closing on protruding substrates. The pod sensor detects the presence of the SMIF pod and prevents mistakenly compromising the airflow between the equipment and the fab.

Features and Benefits:

Class 1 cleanliness

Support SEMI compliant 200mm SMIF pods

All electrical system for easy installation

Substrate protrusion sensors protect reticles during operation

Patent pending pinch sensors for optimal operator and reticle safety

Multiple pod present sensors eliminate operator error

Static dissipative transparent panels

Specifications

Weight: ~51 lbs.

Size: 13.25”w x 18.37”d x 27.50”h

Cycle Time: < 10 seconds