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SORTER/EFEM

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Lamina Series 200mm Sorter

Fortrend has provided Lamina series wafer EFEM since early 2000.
Fortrend owns and manufactures all critical components, like robots, SMIF openers, wafer aligners, ME, and control software. Fortrend offers standard and custom sorter configurations. Fortrend’s wafer Sorter is field-proven, high-throughput, and reliable system that is highly competitive in pricing and performances.

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Fortrend has provided Lamina series wafer and reticle sorter since 1997
Fortrend wafer sorter is a field-proven high-throughput and reliable sorter system that is highly competitive in pricing and performances
Better than Class 1 (ISO-3) cleanliness
Flexible ID reading system is compliant with SEMI M12, M1.15
Single and dual-arm robot for flexible configurations
Unified sorter frame to support both 200mm and 300mm applications allowing easy conversions (upgrades) between 200mm and 300mm sorters, dual-ports, 3-ports, and 4-ports configurations
Optional RFID/Smart Tag /Barcode lot tracking systems
Optional 200/300mm wafer Hybrid sorter system
Optional power interrupt UPS and Raid-5 data base protection
S2/S8/S9/S22/CE certified by TUV company(see certificate)
Full meet SEMI Standards of 300mm transfer equipment (include but not limited E84/E47.1/F47)

Wafer size	SEMI standard 200mm wafers
Cleanness	Class 1 @ 0.1µm (PTFE)
Through put	>550 WPH (Without OCR and Aligner) >250 WPH (With OCR and Aligner)
End-effector	Vacuum blade or optional edge gripper
Robot repeatability	± 0.1mm
Aligner repeatability	± 0.1mm
Communication	HSMS or SECS I / SECS II messages
MTTR	< 2 hours
MTBF	>4,000 hours
Wafer breakage rate	< 10 per 1,000,000 wafers
OS	Window XP Professional or Compatible
Facility requirement	220 V, 50/60 Hz, 15A, 3 wires, 1 phase
Vacuum requirement	-90kPa (min)