ico408-734-9311
Turn Flip Robot
Introduction
Specification
Other products

Features:

Transfer 50-450mm Wafer(2~18’’)
Clean room Application
Single & Dual arm Robot
180°Arm Parallel flipping function (Single or Dual flip)
 Various End-Effector: Bernoulli Blade, Edge Gripper
Linear Track, Mapping Sensor (Optional)
 Customization available when requested

MODEL

8’’Flip Robot

Single Arm

8’’ Flip Robot

Dual Arm

12’’ Flip Robot

Single Arm

12’’ Flip Robot

Dual Arm

ASR-2015-00

ASR-2025-00

ASR-3014-00

ASR-3024-00

Performance

Motion      

Range

R1,R2 axis (Extension)

 567mm

567mm

 730mm

730mm

 T axis (Rotation)

 370deg

370deg

370deg 

370deg

Z axis (Up/down)

240mm 

240mm

300/425mm 

300/425mm

MAX.      

Speed

R1,R2 axis (Extension)

800 mm/sec 

800 mm/sec

 800 mm/sec

800 mm/sec

 T axis (Rotation)

 240 deg/sec

240 deg/sec

240 deg/sec 

240 deg/sec

Z axis (Up/down)

 300 mm/sec

300 mm/sec

300 mm/sec 

300 mm/sec

X axis(Traverse) Optional

 1000≤ mm/sec

1000≤ mm/sec

1000≤ mm/sec 

1000≤ mm/sec

Repeat-ability

R1,R2 axis (Extension)

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm

 T axis (Rotation)

 ≤ ±0.02deg 

 ≤ ±0.02deg

 ≤ ±0.02deg 

 ≤ ±0.02deg

Z axis (Up/down)

≤ ±0.05mm 

≤ ±0.05mm 

≤ ±0.05mm 

≤ ±0.05mm

X axis(Traverse) Optional

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm

MTBF

≥  8000 hrs 

MTTR

≤  2 hrs  

General

Wafer Size

8 inch

12 inch

Control Axis

4

6

4

6

Arm Type

Single Arm 

Dual Arm

Single Arm 

Dual Arm

Blade Thinkness

 < 3.5mm

 < 3.5mm

Cleanliness

Class 1

Load Capacity

1kg(Include Gripper) 

Weight

 38 kg

42 kg

48 kg

52 kg

Cable Length                                              (Robot-Controller)

 3m(Standard)

Utility

Power(Controller)

 Signle Phase AC220±10%, 50/60Hz

Air

 More than 0.5MPa,¢ 6mm

Vacuum

Less than -90kPa 

Environment

Operating Temp

 0-40°C