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Reticle Automation

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PLUS 150 G4

Integrated RSP 150 SMIF opener with reticle handling robot//Support SEMI E111 RSP-150//Opener & Robot Arm meet environment//Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°//Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements//Support serial and parallel I/O communication protocols//Turnkey system on wheels (easy transportation to service areas)//Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers//Optional OCR reader//Optional RFID reader

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Integrated RSP 150 SMIF opener with reticle handling robot – smallest automation footprint
Support SEMI E111 RSP-150
Opener & Robot Arm meet environment.
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader

	PLUS 150 G4
SMIF Pod Size	150 mm (SEMI E111)
Height	1812-1847mm
Width	381mm
Depth	562mm
Reticle Rotation	0 to 360°
Reticle Tilt	0 to 300°
SMIF arm payload	3.2 kg
Pod Interface	SEMI E19.3
Power	110V@3A/ 240V@1.4A, 60/50 Hz
Weight	93Kg (pod not included)
Load height	925 mm ± 25 mm
Mounting Repeatability	±0.5 mm
Cycle time	50 to 65 Seconds
Control	Front Panel, Pendant, Host
Communication	EIA-RS232C, SECS I/II Parallel I/O, SEMI E23-96, IEEE-TTL
Lot ID reader Options	RFID
Cleanliness	ISO Class 1