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PLUS 150 G4
Integrated RSP 150 SMIF opener with reticle handling robot//Support SEMI E111 RSP-150//Opener & Robot Arm meet environment//Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°//Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements//Support serial and parallel I/O communication protocols//Turnkey system on wheels (easy transportation to service areas)//Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers//Optional OCR reader//Optional RFID reader
Introduction
Specification
Other products
Integrated RSP 150 SMIF opener with reticle handling robot – smallest automation footprint
Support SEMI E111 RSP-150
Opener & Robot Arm meet environment.
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader

 

PLUS 150 G4

SMIF Pod Size

150 mm (SEMI E111)

Height

1812-1847mm

Width

381mm

Depth

562mm

Reticle Rotation

0 to 360°

Reticle Tilt

0 to 300°

SMIF arm payload

3.2 kg

Pod Interface

SEMI E19.3

Power

110V@3A/ 240V@1.4A, 60/50 Hz

Weight

93Kg (pod not included)

Load height

925 mm ± 25 mm

Mounting Repeatability

±0.5 mm

Cycle time

50 to 65 Seconds

Control

Front Panel, Pendant, Host

Communication

EIA-RS232C, SECS I/II

Parallel I/O, SEMI E23-96, IEEE-TTL

Lot ID reader Options

RFID

Cleanliness

ISO Class 1

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