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PLM 150Rx
ISO Class 1 cleanliness with active self-clean air flow design.//Supports Multiple and Single SMIF 150 pods//Lifts the Pod shell leaving the Reticles in a sealed mini-environment//All electrical system with field programmable application software//Four programmable Interlock signals//Pod Present,Mask Mapping,Protrusion sensor//OHT Compatible//Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.//Optional version with integral RFID reader/writer
Introduction
Specification
Other products
·Small footprint saves valuable FAB floor space
·ISO Class 1 cleanliness with active self-clean air flow design.
·Supports Multiple and Single SMIF 150 pods
·Lifts the Pod shell leaving the Reticles in a sealed mini-environment
·All electrical system with field programmable application software
·Four programmable Interlock signals
·Pod Present Sensors
·Mask Mapping Sensor
·Protrusion sensor
·OHT Compatible
·Meets SEMI E19.3, E111, E112, E117, S2 and S8 standards and CE certified
·Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.
·Optional version with integral RFID reader/writer

Specifications:

Reticle size

152mm W x 152mm D x 6.35mm H

Dimension

467W x 460D x 770H mm

Elevator Stroke

210 mm

Load capacity

5.4kg

Pod Types

SEMI E111 Single RSP

SEMI E112 Multiple RSP

Pod interface

SEMI E19.3

Power requirement

100V/240VAC @ 1Amp 50/60Hz

Or 24 VDC (Option)

Weight

23kg without Pod

Open Pod

< 12 seconds

Close Pod

< 10 seconds

MCBF

50,000 cycles

MTTR

< 1 hour

Communication

Parallel and/or Serial

Communication

EIA-RS232C(SECS I/II)

ID device (Optional)

RFID module or IR Link

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