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Reticle Automation

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PLM 150Rx

ISO Class 1 cleanliness with active self-clean air flow design.//Supports Multiple and Single SMIF 150 pods//Lifts the Pod shell leaving the Reticles in a sealed mini-environment//All electrical system with field programmable application software//Four programmable Interlock signals//Pod Present，Mask Mapping，Protrusion sensor//OHT Compatible//Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.//Optional version with integral RFID reader/writer

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Specification

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·Small footprint saves valuable FAB floor space
·ISO Class 1 cleanliness with active self-clean air flow design.
·Supports Multiple and Single SMIF 150 pods
·Lifts the Pod shell leaving the Reticles in a sealed mini-environment
·All electrical system with field programmable application software
·Four programmable Interlock signals
·Pod Present Sensors
·Mask Mapping Sensor
·Protrusion sensor
·OHT Compatible
·Meets SEMI E19.3, E111, E112, E117, S2 and S8 standards and CE certified
·Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.
·Optional version with integral RFID reader/writer

Specifications:
Reticle size	152mm W x 152mm D x 6.35mm H
Dimension	467W x 460D x 770H mm
Elevator Stroke	210 mm
Load capacity	5.4kg
Pod Types	SEMI E111 Single RSP SEMI E112 Multiple RSP
Pod interface	SEMI E19.3
Power requirement	100V/240VAC @ 1Amp 50/60Hz Or 24 VDC (Option)
Weight	23kg without Pod
Open Pod	< 12 seconds
Close Pod	< 10 seconds
MCBF	50,000 cycles
MTTR	< 1 hour
Communication	Parallel and/or Serial
Communication	EIA-RS232C(SECS I/II)
ID device (Optional)	RFID module or IR Link