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PLUS 150R-X/PLUS 500R-X
Straight arm Movement with cassette able to rotate up to 359° for angled cassette stages//Loads cassette to tool stage with wafers Horizontally//Wafer Mapper//Wafer protrusion sensor/Cassette Present Sensor/SMIF pod in place Sensors/SMIF pod Present Sensor//Info Pad Plugs//Left or Right I/O panel//Tool Mount/Dust cover
Introduction
Specification
Other products

Easy to Integrate
The fully automatic Fortrend Plus 500 R-X transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 500 R-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that rotates 350˚ offers angled cassette placement and small chamber space that cannot be accessed by any other existing SMIF solutions. Plus 500R model illustrates another engineering excellence of Fortrend products.
Simple to Maintain
All Plus 500 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.
Safe and Reliable
A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.
With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 500 R-X is the best choice for both OEMs and system integrators.
Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend’s expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.

MODEL

PLUS 500R-L

PLUS 500R-R

PLUS 500R-L

with E84

PLUS 500r-R

with E84

I/O Panel

Left

Right

Left

Right

E84 COMM Board

NO

NO

YES

YES

Dimensions

34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels)

Wheel Height

6 to 15.3 cm tool dependent

Cycle time (load)

55 sec. (R Model leave pod open after load)

Cycle time (Unload)

55 sec. (R Model pod left open after load)

Arm Extension

305mm

Arm Z Travel

135mm

Power

100 to 240 VAC @

50/60 Hz

Weight

93 Kg (not including SMIF

pod)

Power-on reset time

<20 Secs

SMIF Arm

Payload

3.2 Kg

Arm Extent axis

precision

±0.1 mm

Arm Elevator

axis precision

±0.1 mm

Gripper axis

precision

±0.5 mm

Wrist axis

precision

±0.15 degree

Control

Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant

Communication

Interface

RS232 (Serial) – Fortrend HEX or ASCII or SECS

Parallel I/O

Lot ID Reader Options

IR (Smart) Tag – 8200 or 8400 series

RFID Read/write Module – Fortrend or Hermos or Other RFID Intellion Lot Track system