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Dual Arms Scara Robot
Introduction
Specification
Other products

Features:

Transfer 50-450mm Wafer(2~18’’)//Clean room Application//ODM or OEM Supply//Single & Dual arm/Multi Blade Type//Fast & Precise Motion Robot
0.1 micron meter CLASS 1 Cleanliness//Various End-Effector: Vacuum Blade, Edge Gripper//Linear Track, Mapping Sensor (Optional)//Customization available when requested

MODEL

8’’ASR

Single Arm

8’’ASR

Dual Arm

12’’ASR

Single Arm

12’’ASR

Dual Arm

ASR-2010-00

ASR-2020-00

ASR-3010-00

ASR-3020-00

Performance

Motion      

Range

R1,R2 axis (Extension)

 567mm

567mm

 730mm

730mm

 T axis (Rotation)

 370deg

370deg

370deg 

370deg

Z axis (Up/down)

240mm 

240mm

300/425mm 

300/425mm

MAX.      

Speed

R1,R2 axis (Extension)

800 mm/sec 

800 mm/sec

 800 mm/sec

800 mm/sec

 T axis (Rotation)

 240 deg/sec

240 deg/sec

240 deg/sec 

240 deg/sec

Z axis (Up/down)

 300 mm/sec

300 mm/sec

300 mm/sec 

300 mm/sec

X axis(Traverse) Optional

 1000≤ mm/sec

1000≤ mm/sec

1000≤ mm/sec 

1000≤ mm/sec

Repeat-ability

R1,R2 axis (Extension)

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm

 T axis (Rotation)

 ≤ ±0.02deg 

 ≤ ±0.02deg

 ≤ ±0.02deg 

 ≤ ±0.02deg

Z axis (Up/down)

≤ ±0.05mm 

≤ ±0.05mm 

≤ ±0.05mm 

≤ ±0.05mm

X axis(Traverse) Optional

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm 

≤ ±0.1mm

MTBF

≥  8000 hrs 

MTTR

≤  2 hrs  

General

Wafer Size

8 inch

12 inch

Control Axis

3

4

3

4

Arm Type

Single Arm 

Dual Arm

Single Arm 

Dual Arm

Blade Thinkness

 < 2.5mm

 < 3mm

Cleanliness

Class 1

Load Capacity

1kg(Include Gripper) 

Weight

 38 kg

42 kg

48 kg

52 kg

Cable Length                                              (Robot-Controller)

 3m(Standard)

Utility

Power(Controller)

 Signle Phase AC220±10%, 50/60Hz

Air

 More than 0.5MPa,¢ 6mm

Vacuum

Less than -90kPa 

Environment

Operating Temp

 0-40°C