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SMIF

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PLUS 500F

Small footprint saves valuable FAB floor space
ISO Class 2 or better cleanliness with active self-clean air flow design.
Lifts the Pod shell leaving the Wafer Cassette in a sealed mini-environment
Robot Arm loads Cassette to A400 3 level internal Carousal
Drop in Replacement for existing A400 SMIF
ASM Approved SMIF Option
All electrical system with field programmable application software

Consultation Inquiry

Introduction

Specification

Other products

Wafer Cassette Present Sensor
Wafer Protrusion Sensor
Pod Present Sensor
Wafer Mapping Sensor (Present, Cross Slot)
SEMI E19.4, S2 and S8 standards and CE certified
Mounts directly to existing ASM SMIF Mount
Teach Pendant
Optional Universal Floor Mount.
Optional RFID reader/writer

POD/Wafer Size		200 mm
Dimensions	Width	500 mm body (710 mm Wheel Base)
	Depth	674 mm
	Height	1770 mm
Robot arm payload		8 kg
Pod Interface		SEMI E19.4
Cleanliness		ISO Class 2 or better
Power requirement		100-240VAC @10 AMPS, 50/60 Hz
Weight		185 Kg
Load height		764 to 1234mm
Load Reach		250mm
Load Repeatability		± 0.05 mm
Mounting repeatability		± 0.25mm
Throughput		<100 Seconds Load <100 Seconds Unload
Noise level		< 75 dBA
Pendant		0.3 kg, LCD display, 40 keys, RJ-11 connector
Communication		EIA-RS232C, SECS I/II Parallel I/O, SEMI E23-96, IEEE-TTL
Lot ID reader option		RFID and/or IR Link, SMART TAG
External EMO		Yes
Working Temperature		0 ~ 40ºC
Working Humidity		5% ~ 90%, Non-condensing