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PLM EUV Dual
ISO Class 1 cleanliness with active self-clean air flow design//Automatic unlocks and locks SMIF outer pod door//Lifts both inner and outer pod doors//Applies 80N force to Outer Pod door, per SEMI E152, during Unlocking and Locking of the Outer Pod door//Four programmable Interlock signals//Inner pod Present Sensor//Inner pod alignment sensors//Info Pad sensors detect Pod Type//Serial or Parallel, SECS optional.
//OHT Compatible//Optional RFID reader/writer//Optional Purge Available//Unlock/Locks Standard 200mm SEMI E100 Reticle SMIF Pods (RSP)
Introduction
Specification
Other products
lISO Class 1 cleanliness with active self-clean air flow design.
lAutomatic unlocks and locks SMIF outer pod door
lLifts both inner and outer pod doors.
lApplies 80N force to Outer Pod door, per SEMI E152, during Unlocking and Locking of the Outer Pod door.
lAll electrical system with field programmable application software
lFour programmable Interlock signals
lInner pod Present Sensor
lInner pod alignment sensors
lInfo Pad sensors detect Pod Type - RSP 200 or EUV Pod
lCommunication: Serial or Parallel, SECS optional.
lMeets SEMI E19.4, E84, E100, E117, E152, S2 and S8 standards and CE certified
lOHT Compatible
lOptional RFID reader/writer
lOptional Purge Available
lUnlock/Locks Standard 200mm SEMI E100 Reticle SMIF Pods (RSP)

Specifications:

Reticle size

152mm W x 152mm D x

6.35mm H

Dimension

363W x 420D x 700H mm

Elevator Stroke

240 mm

Load capacity

5.4kg

Pod Types

SEMI E152 RSP or E100

RSP

Pod interface

SEMI E19.4

Power requirement

100V/240VAC @ 1Amp

50/60Hz

Or 24 VDC (Option)

Weight

23kg without Pod

Open Pod

< 5 seconds

Close Pod

< 5 seconds

MCBF

50,000 cycles

MTTR

< 1 hour

Pod PIP sensor

1 set

Communication

Parallel and/or Serial

Communication

EIA-RS232C(SECS I/II)

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