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PLUS 500 G4
Integrated RSP 200 SMIF opener with reticle handling robot – smallest automation footprint
Support SEMI E100 RSP-200
Opener & Robot Arm meet
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader
Introduction
Specification
Other products
·Integrated RSP 200 SMIF opener with reticle handling robot – smallest automation footprint
·Support SEMI E100 RSP-200
·Opener & Robot Arm meet
·Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
·Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
·Support serial and parallel I/O communication protocols
·Turnkey system on wheels (easy transportation to service areas)
·Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
·Optional OCR reader
Optional RFID reader

 

PLUS 500 G4

SMIF Pod Size

200 mm (SEMI E100)

Height

1812-1847mm

Width

381mm

Depth

562mm

Reticle Rotation

0 to 360°

Reticle Tilt

0 to 300°

SMIF arm payload

3.2 kg

Pod Interface

SEMI E19.4

Power

110V@3A/ 240V@1.4A, 60/50 Hz

Weight

93Kg (pod not included)

Load height

925 mm ± 25 mm

Mounting

Repeatability

±0.5 mm

Cycle time

50 to 65 Seconds

Control

Front Panel, Pendant, Host

Communication

EIA-RS232C, SECS I/II

Parallel I/O, SEMI E23-96, IEEE-TTL

Lot ID reader Options

RFID

C11leanliness

ISO Class 1

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