408-734-9311
service@Fortrend.com
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Fortrend POM-200R is an automated SMIF pod opener designed to open 200mm single and multiple reticle SMIF pods. After the pod cover is lifted, the reticles remain on the pod table that can be manipulated safely by operators. Designed for tabletop applications, the POM is an all-electrical system for quick installation and removal. An optional patented substrate mapping technology protects against breakage during substrate handling operations. A reticle protrusion sensor with operational interlock prevents the pod from closing on protruding substrates. The pod sensor detects the presence of the SMIF pod and prevents mistakenly compromising the airflow between the equipment and the fab.
Features and Benefits:
Class 1 cleanliness
Support SEMI compliant 200mm SMIF pods
All electrical system for easy installation
Substrate protrusion sensors protect reticles during operation
Patent pending pinch sensors for optimal operator and reticle safety
Multiple pod present sensors eliminate operator error
Static dissipative transparent panels
Specifications
Weight: ~51 lbs.
Size: 13.25”w x 18.37”d x 27.50”h
Cycle Time: < 10 seconds
MCBF: 50,000 cycles
MTTR: Less than 1 hour
Power: 1A max, single phase
50/60 Hz @ 115/240 VAC
Communications: Optional Parallel and Serial
Optional SECS I / II
Options: Mapping, RFID
Contact Us
ADDRESS：2220 O’ Toole Avenue, San Jose, CA 95131
EMAIL：service@Fortrend.com
CALL US：408-734-9311
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