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PLM 200Rx
Small footprint saves valuable FAB floor space;  ISO Class 1 cleanliness with active self-clean air flow design;  Opens Standard E100 RSP and EUV E152 Outer Pods Door;  Lifts the Pod shell leaving the Reticles in a sealed mini environment;  Applies 80N Force to E152 Pod doors during opening and Closing;  Info Pad Sensor to detect Pod Type;  All electrical system with field programmable application software;  OHT Compatible;
Introduction
Specification
Other products
Small footprint saves valuable FAB floor space
ISO Class 1 cleanliness with active self-clean air flow design.
Opens Standard E100 RSP and EUV E152 Outer Pods Door
Lifts the Pod shell leaving the Reticles in a sealed mini environment
Applies 80N Force to E152 Pod doors during opening and Closing.
Info Pad Sensor to detect Pod Type
All electrical system with field programmable application software
OHT Compatible
Reticle Present Sensor (E100 SMIF Pods)
Inner Pod Present Sensor (E152 EUV SMIF Pods)
Pellicle Present and Orientation sensor (for E100 SMIF Pods)
Meets SEMI E19.4, E100, E152, E117, S2 and S8 standards and CE certified
Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.
Optional RFID reader/writer

Specifications:

Reticle size

150mm W x 150mm D x

6.35mm H

Dimension

467W x 460D x 770H mm

Elevator Stroke

210 mm

Load capacity

5.4kg

Pod Types

SEMI E100 Single RSP

SEMI E152 EUV SMIF Pod

Pod interface

SEMI E19.4

Power requirement

100V/240VAC @ 1Amp

50/60Hz

Or 24 VDC (Option)

Weight

23kg without Pod

Open Pod

< 12 seconds

Close Pod

< 10 seconds

MCBF

50,000 cycles

MTTR

< 1 hour

Communication

Parallel and/or Serial

Communication

EIA-RS232C(SECS I/II)

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