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PLUS 500S-X

Easy to Integrate
The fully automatic Fortrend Plus500S transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 500S-X is easy to integrate with AGV system and into small areas. 
A programmable robotic arm with end-effector that tilts wafers into the vertical position accommodates a wide variety of process tools.

Simple to Maintain

All Plus 500 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.

PLUS 500S-X
Safe and Reliable 
A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.
With many fail-safe features including pod present sensor, wafer protrusion sensor, cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 500 S-X is the best choice for both OEMs and system integrators.

Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend’s expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.
Product Specifications
SMIF Product Series


MODEL PLUS150S-L PLUS 150S-R

PLUS 150S-L with E84

PLUS 150S-R with E84

I/O Panel Left Right Left Right
E84 COMM Board NO NO YES YES
Dimensions 34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels)
Wheel Height 6 to 15.3 cm tool dependent
Cycle Time (Load) <55 sec. (S Model without tilt and leave pod open after load)
Cycle Time (Unload) <55 sec. (S Model without tilt with pod left open after load)
Arm Extension 390mm Arm Z Travel 135mm
Power

100 to 240 VAC @ 50/60 Hz

Weight

93 Kg (not including SMIF pod

Power-on Reset Time <20 Secs

SMIF Arm Payload

3.2 Kg

Arm Extent Axis Precision

±0.1 mm

Arm Elevator

Axis Precision

±0.1 mm
Gripper Axis

Precision

±0.5 mm

Tilt Axis

Precision

±0.15 degree
Control Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant

Communication Interface

RS232 (Serial) – Fortrend HEX or ASCII or SECS

Parallel I/O

Lot ID Reader Options

IR (Smart) Tag – 8200 or 8400 series

RFID Read/Write Module – Fortrend or Hermos or Other RFID Intellion Lot Track System


MODLE PLUS 500S-L PLUS 500S-R PLUS 500S-L with E84 PLUS 500S-R with E84
I/O Panel Left Right Left Left
E84 COMM Board NO NO NO NO
Dimensions 34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels)
Wheel Height 6 to 15.3 cm tool dependent
Cycle time (load) <55 sec. (S Model without tilt and leave pod open after load)
Cycle time (Unload) <55 sec. (S Model without tilt with pod left open after load)
Arm Extension 390mm Arm Z Travel 135mm
Power 100 to 240 VAC @50/60 Hz Weight 93 Kg (not including SMIF pod)
Power-on reset time <20 Secs SMIF Arm Payload 3.2 Kg
Arm Extent axis precision ±0.1 mm Arm Elevator axis precision ±0.1 mm
Gripper axis precision ±0.5 mm Tilt axis precision ±0.15 degree
Control Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant
Communication Interface RS232 (Serial) – Fortrend HEX or ASCII or SECS
Parallel I/O
Lot ID Reader Options IR (Smart) Tag – 8200 or 8400 series
RFID Read/write Module – Fortrend or Hermos or Other RFID Intellion Lot Track system


Consultation Form
For urgent requests, please call the local office directly.
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Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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408-734-9311sales@fortrend.com

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