Easy to Integrate
The fully automatic Fortrend Plus500S transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 500S-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm with end-effector that tilts wafers into the vertical position accommodates a wide variety of process tools.
Simple to Maintain
All Plus 500 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.
MODEL | PLUS150S-L | PLUS 150S-R |
PLUS 150S-L with E84 |
PLUS 150S-R with E84 |
I/O Panel | Left | Right | Left | Right |
E84 COMM Board | NO | NO | YES | YES |
Dimensions | 34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels) | |||
Wheel Height | 6 to 15.3 cm tool dependent | |||
Cycle Time (Load) | <55 sec. (S Model without tilt and leave pod open after load) | |||
Cycle Time (Unload) | <55 sec. (S Model without tilt with pod left open after load) | |||
Arm Extension | 390mm | Arm Z Travel | 135mm | |
Power |
100 to 240 VAC @ 50/60 Hz |
Weight |
93 Kg (not including SMIF pod |
|
Power-on Reset Time | <20 Secs |
SMIF Arm Payload |
3.2 Kg | |
Arm Extent Axis Precision |
±0.1 mm |
Arm Elevator Axis Precision |
±0.1 mm | |
Gripper Axis
Precision |
±0.5 mm |
Tilt Axis Precision |
±0.15 degree | |
Control | Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant | |||
Communication Interface |
RS232 (Serial) – Fortrend HEX or ASCII or SECS Parallel I/O |
|||
Lot ID Reader Options |
IR (Smart) Tag – 8200 or 8400 series RFID Read/Write Module – Fortrend or Hermos or Other RFID Intellion Lot Track System |
MODLE | PLUS 500S-L | PLUS 500S-R | PLUS 500S-L with E84 | PLUS 500S-R with E84 |
I/O Panel | Left | Right | Left | Left |
E84 COMM Board | NO | NO | NO | NO |
Dimensions | 34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels) | |||
Wheel Height | 6 to 15.3 cm tool dependent | |||
Cycle time (load) | <55 sec. (S Model without tilt and leave pod open after load) | |||
Cycle time (Unload) | <55 sec. (S Model without tilt with pod left open after load) | |||
Arm Extension | 390mm | Arm Z Travel | 135mm | |
Power | 100 to 240 VAC @50/60 Hz | Weight | 93 Kg (not including SMIF pod) | |
Power-on reset time | <20 Secs | SMIF Arm Payload | 3.2 Kg | |
Arm Extent axis precision | ±0.1 mm | Arm Elevator axis precision | ±0.1 mm | |
Gripper axis precision | ±0.5 mm | Tilt axis precision | ±0.15 degree | |
Control | Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant | |||
Communication Interface |
RS232 (Serial) – Fortrend HEX or ASCII or SECS Parallel I/O |
|||
Lot ID Reader Options |
IR (Smart) Tag – 8200 or 8400 series RFID Read/write Module – Fortrend or Hermos or Other RFID Intellion Lot Track system |
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