Optimized for Integration Efficiency
The Fortrend Plus500S delivers fully automated 200mm cassette transfers from SMIF pods to process stages in ≤90 seconds, with dual-mode operation for both SMIF and non-SMIF environments. Maintaining a footprint comparable to standard SMIF pods, the Plus500S-X enables direct AGV/OHT system integration and deployment in space-restricted areas. Its programmable robotic arm with vertical wafer-tilting end effector ensures compatibility across diverse process tool configurations, eliminating the need for mechanical recalibration during tool changeovers.
Streamlined Maintainance Design
All Plus 500 models implement diamond-pin interfaces with quick-release latches and universal floor mounts, allowing reconnection to any process tool within 15 minutes. This capability reduces downtime during daily tooling adjustments while simplifying preventive maintenance procedures. The open-frame architecture provides immediate visual access to core components, further minimizing service interruptions.