PLUS 150S-X

Easy to Integrate
The fully automatic Fortrend Plus 150S transfers 150mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 150S-X is easy to integrate with AGV system and into small areas. 
A programmable robotic arm with end-effector that tilts wafers into the vertical position accommodates a wide variety of process tools.
Simple to Maintain
All Plus 150 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.