150mm Semiconductor Wafer SMIF Transfer Solutions-FORTREND

PLUS 150S-X

Optimized for Integration Efficiency
The Fortrend Plus 150S performs fully automated transfers of 150mm cassettes from SMIF pods to process stages in 90 seconds or less, with dual functionality for SMIF and non-SMIF environment tool loading. The system’s footprint remains comparable to a standard SMIF pod, supporting direct integration with both AGV and OHT systems without spatial constraints. Its programmable robotic arm with vertical wafer-tilting end-effector accommodates diverse process tool configurations. Tool reconnection cycles are completed within 15 minutes using diamond-pin interface plates and quick-release latches, critical for high-frequency disconnections during process adjustments.
Streamlined Maintaince Design
All Plus 150 models implement diamond-pin interfaces with quick-release latches and universal floor mounts, allowing reconnection to any process tool within 15 minutes. This capability reduces downtime during daily tooling adjustments while simplifying preventive maintenance procedures. The open-frame architecture provides immediate visual access to core components, further minimizing service interruptions.

Plus 150S-X

Safe and Reliable
A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.
With many fail-safe features including pod present sensor, wafer protrusion sensor, cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 150 S-X is the best choice for both OEMs and system integrators

Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend’s expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.

Product Specifications

MODEL	PLUS150S-L	PLUS 150S-R	PLUS 150S-L with E84	PLUS 150S-R with E84
I/O Panel	Left	Right	Left	Right
E84 COMM Board	NO	NO	YES	YES
Dimensions	34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels)
Wheel Height	6 to 15.3 cm tool dependent
Cycle Time (Load)	＜55 sec. (S Model without tilt and leave pod open after load)
Cycle Time (Unload)	＜55 sec. (S Model without tilt with pod left open after load)
Arm Extension	390mm		Arm Z Travel	135mm
Power	100 to 240 VAC @ 50/60 Hz		Weight	93 Kg (not including SMIF pod
Power-on Reset Time	<20 Secs		SMIF Arm Payload	3.2 Kg
Arm Extent Axis Precision	±0.1 mm		Arm Elevator Axis Precision	±0.1 mm
Gripper Axis Precision	±0.5 mm		Tilt Axis Precision	±0.15 degree
Control	Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant
Communication Interface	RS232 (Serial) – Fortrend HEX or ASCII or SECS Parallel I/O
Lot ID Reader Options	IR (Smart) Tag – 8200 or 8400 series RFID Read/Write Module – Fortrend or Hermos or Other RFID Intellion Lot Track System

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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