150mm SMIF & Wafer Handling Solutions | 6 Inches Wafer Processing

Easy to Integrate
The fully automatic Fortrend Plus 150 R-X transfers 150mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 500 R-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that rotates 350˚ offers angled cassette placement and small chamber space that cannot be accessed by any other existing SMIF solutions. Plus 150R model illustrates another engineering excellence of Fortrend products.
Simple to Maintain
All Plus 150 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.

Safe and Reliable
A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.
With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 500R-X is the best choice for both OEMs and system integrators.
Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend’s expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.

Product Specifications

MODEL	PLUS 150R-L	PLUS 150R-R	PLUS 150R-L with E84	PLUS 150R-R with E84
I/O Panel	Left	Right	Left	Right
E84 COMM Board	NO	NO	YES	YES
Dimensions	34.8cm (W) x 49.8cm (D) x 170.9cm (H without Wheels)
Wheel Height	6 to 15.3 cm tool dependent
Cycle Time (Load)	＜55 sec. (R Model leave pod open after load)
Cycle Time (Unload)	＜55 sec. (R Model pod left open after load)
Arm Extension	305mm		Arm Z Travel	135mm
Power	100 to 240 VAC @ 50/60 Hz		Weight	93 Kg (not including SMIF pod)
Power-on Reset Time	<20 Secs		SMIF Arm Payload	3.2 Kg
Arm Extent Axis Precision	±0.1 mm		Arm Elevator Axis Precision	±0.1 mm
Gripper Axis Precision	±0.5 mm		Wrist Axis Precision	±0.15 degree
Control	Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant
Communication Interface	RS232 (Serial) – Fortrend HEX or ASCII or SECS Parallel I/O
Lot ID Reader Options	IR (Smart) Tag – 8200 or 8400 series RFID Read/Write Module – Fortrend or Hermos or Other RFID Intellion Lot Track System

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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