Fortrend wafer sorters are mainly used for wafer transfer, sorting, and merging operations, and can compatible with wafers ranging from 3" to 12".
Adopting a modular design, the internal cleanliness can achieve ISO Class 1, and it can accommodate wafers of various sizes and types. It features independent integrity, high cleanliness, high compatibility, and other characteristics.
It is compatible with all SEMI-standard FOUPs (Front Opening Unified Pods), FOSBs (Full Open Shuttle Bays), SMIF PODs (Standard Mechanical InterFace Pods), and Cassette .
Wafer thickness support: 100 - 1500μm
Workstations 2 to 8 are optional
Supports the transportation of wafers of various sizes
Various feeding methods are available
Compact design
SECS/GEM
safety curtain
OCR (top or bottom)
N2 purge LP
Rated Voltage | Phase AC 220V 50/60 Hz |
Rated Power | 3.52kW(Decide by config) |
Comm Interface | RJ45 |
Comm protocol | ASCI/HEX/HSMS&SECS Ⅱ |
Software | Fortrend independently developed software |
Cleanliness | ISO 14644-1 class 1 / ISO class 3 |
Uptime | ≥99% |
MTBF | ≥4000 hours |
MTTR | ≤4 hours |
MTBA | >100 hours |
MTTA | <10 hours |
MCBF | 100,000Wafers |
Wafer Breakage Rate | ≤1/1,000,000 |
OCR Accuracy Rate for Bare Wafers | ≥99.8% |
Repeatability of Positioning Accuracy | 士0.1mm |
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