| Mask Size | 150mm |
| Overall Height | 2082mm(82") |
| Width | 4928mm(194") |
| Depth | 1524mm(60") |
| Pod Compatibility (customized) | SEMI E100 compliant 200mm RSP |
| Cleanliness | ISO Class 1 |
| Power requirement | 208VAC,30 Amps, Single Phase, 50/60 Hz(Full load is 24 Amps) |
| Air | CDA @ 90psig, minimum flow rate of lcfi |
| Vacuum | 19" Hg, minimum flow rate of 1 cfm |
| Nitrogen | N2 @ 90psig, minimum flow rate of lcfm |
| Weight | 2050 Kg (4,500 lbs.) |
| MTTR | 19°C to 21°C (66'F to 70°F) |
| Humidity | 39 +/-4 % RH |
| Pod Load Height | SEMI compliant |
| Noise level | <70 dB |
| Chemical Information | None Used on System |
| Exhaust Requirements | None - Modules Dump to FAB Floor |
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
Copyright © FORTREND. Any commercial promotion of goods or services, whether directly or indirectly to consumers on this website, is considered 'advertising' (excluding product-related information such as packaging, specifications, and after-sales support)
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