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Fortrend offers a range of EUV & 193 Reticle handling automation solutions to meet the evolving cleanliness standard’s demanded by today’s industry.
The Lamina 200 Series Sorter system offer solutions from transferring the Reticles from storage and shipping boxes to SMIF pods both in the Mask houses and FAB floors. The systems are built in a modular design to suit customer requirements. The transfer of Reticles is inside a ISO class 1 Mini-environment.
QC tool designed for mask houseISO Class 1 cleanlinessSupport Reticle SMIF POD, shipping and storage boxModular DesignVision system: Bright light Inspection Station (BLIS)Read station (Barcode,OCR, ID)Reticle Scara Robot and Turn-Flip Robot
Product Specifications


Mask Size 150mm
Overall Height 2082mm(82")
Width 4928mm(194")
Depth 1524mm(60")
Pod Compatibility
(customized)

SEMI E100 compliant 200mm RSP
SEMI E152 EUV Dual Pod
DMS Clam Shell (770-550306-10)
IBM Blue Clam Shell
ShinEtsu 5 slot blank box
HOYA 5 slot blank box
Pozzetta clam shell PZT-600-69925

Cleanliness ISO Class 1
Power requirement 208VAC,30 Amps, Single Phase, 50/60 Hz(Full load is 24 Amps)
Air CDA @ 90psig, minimum flow rate of lcfi
Vacuum 19" Hg, minimum flow rate of 1 cfm
Nitrogen N2 @ 90psig, minimum flow rate of lcfm
Weight 2050 Kg (4,500 lbs.)
MTTR 19°C to 21°C (66'F to 70°F)
Humidity 39 +/-4 % RH
Pod Load Height SEMI compliant
Noise level <70 dB
Chemical Information None Used on System
Exhaust Requirements None - Modules Dump to FAB Floor


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For urgent requests, please call the local office directly.
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Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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408-734-9311sales@fortrend.com

2220 O’Toole Avenue, San Jose, CA 95131

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