Wafer Cassette (POD)
The wafer cassette is a sealed container used to store wafers during the storage and transportation processes. It can accommodate 25 pieces of 200/300mm wafers inside. It separates the wafers from the surrounding environment to ensure a sealed clean environment and reduce the vibration of wafers during the transfer process.

SMIF I/O (input&Output)
Through an automated mechanical device, the wafer carrier (cassettes) is taken out from the wafer cassette (POD) by the SMIF robot arm (SMIF I-Arm) and placed on the interface of the process equipment for processing. Then, the cassettes are retrieved and put back into the wafer cassette (POD). The entire process is isolated from the influence of the external environment, which is more reliable and has a higher fault tolerance rate.

Mini-environment
The mini-environment contains highly integrated components such as process equipment, wafer cassettes (POD), wafer carriers (cassettes), robot arms, lifting/lowering modules, and a variety of sensors. It performs complex mechanical procedures such as loading, transferring, and conveying through a specific SMIF system. It is integrated with the SMIF system through appropriate interfaces to form an independent work unit. It prevents the possible pollution caused by the slight organic volatile substances overflowing from the materials of the equipment itself, the generation of contaminants during the movement process, and the sealing performance of the equipment, etc.