ntegrated RSP 200 SMIF opener with reticle handling robot – smallest automation footprint
Support SEMI E100 RSP-200
Opener & Robot Arm meet
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader
SMIF Pod Size | 200 mm (SEMI E100) |
Height | 1812-1847mm |
Width | 381mm |
Depth | 562mm |
Reticle Rotation | 0 to 360° |
Reticle Tilt | 0 to 300° |
SMIF Arm Payload | 3.2 kg |
Pod Interface | SEMI E19.3 |
Power | 110V@3A/ 240V@1.4A, 60/50 Hz |
Weight | 93Kg (pod not included) |
Load Height | 925 mm ± 25 mm |
Mounting Repeatability | ±0.5 mm |
Cycle Time | 50 to 65 Seconds |
Control | Front Panel, Pendant, Host |
Communication |
EIA-RS232C, SECS I/II Parallel I/O, SEMI E23-96, IEEE-TT |
Lot ID Reader Options | RFID |
Cleanliness | ISO Class 1 |
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