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Integrated RSP 200 SMIF opener with reticle handling robot – smallest automation footprint
Support SEMI E100 RSP-200
Opener & Robot Arm meet
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader

ntegrated RSP 200 SMIF opener with reticle handling robot – smallest automation footprint

Support SEMI E100 RSP-200

Opener & Robot Arm meet

Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°

Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)

Support serial and parallel I/O communication protocols

Turnkey system on wheels (easy transportation to service areas)

Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers

Optional OCR reader

Optional RFID reader

Product Specifications
SMIF Pod Size 200 mm (SEMI E100)
Height 1812-1847mm
Width 381mm
Depth 562mm
Reticle Rotation 0 to 360°
Reticle Tilt 0 to 300°
SMIF Arm Payload 3.2 kg
Pod Interface SEMI E19.3
Power 110V@3A/ 240V@1.4A, 60/50 Hz
Weight 93Kg (pod not included)
Load Height 925 mm ± 25 mm
Mounting Repeatability ±0.5 mm
Cycle Time 50 to 65 Seconds
Control Front Panel, Pendant, Host
Communication

EIA-RS232C, SECS I/II

Parallel I/O, SEMI E23-96, IEEE-TT

Lot ID Reader Options RFID
Cleanliness ISO Class 1

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Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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