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ntegrated RSP 200 SMIF opener with reticle handling robot – smallest automation footprint
Support SEMI E100 RSP-200
Opener & Robot Arm meet
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader
| SMIF Pod Size | 200 mm (SEMI E100) |
| Height | 1812-1847mm |
| Width | 381mm |
| Depth | 562mm |
| Reticle Rotation | 0 to 360° |
| Reticle Tilt | 0 to 300° |
| SMIF Arm Payload | 3.2 kg |
| Pod Interface | SEMI E19.3 |
| Power | 110V@3A/ 240V@1.4A, 60/50 Hz |
| Weight | 93Kg (pod not included) |
| Load Height | 925 mm ± 25 mm |
| Mounting Repeatability | ±0.5 mm |
| Cycle Time | 50 to 65 秒 |
| Control | Front Panel, Pendant, Host |
| Communication |
EIA-RS232C, SECS I/II Parallel I/O, SEMI E23-96, IEEE-TT |
| Lot ID Reader Options | RFID |
| Cleanliness | ISO Class 1 |
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
Copyright © FORTREND. Any commercial promotion of goods or services, whether directly or indirectly to consumers on this website, is considered 'advertising' (excluding product-related information such as packaging, specifications, and after-sales support)
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