Support SEMI E100 RSP-200
Opener & Robot Arm meet
Rotate Reticle 0 to 360°; Flip Reticle 0 to 300°
Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader
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