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Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)
Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader

Various reticle handling arms and gripper designs for flexible OEM reticle manipulation requirements (flip, rotation, extended reach, OCR/BCR, etc.)

Support serial and parallel I/O communication protocols
Turnkey system on wheels (easy transportation to service areas)
Optional 1D, 2D (SEMI T11) and EUV (SEMI T16) bar code readers
Optional OCR reader
Optional RFID reader
Product Specifications
SMIF Pod Size200 mm (SEMI E100)
Height1812-1847mm
Width381mm
Depth562mm
Reticle Rotation0 to 360°
Reticle Tilt0 to 300°
SMIF Arm Payload3.2 kg
Pod InterfaceSEMI E19.3
Power110V@3A/ 240V@1.4A, 60/50 Hz
Weight93Kg (pod not included)
Load Height925 mm ± 25 mm
Mounting Repeatability±0.5 mm
Cycle Time50 to 65 秒
ControlFront Panel, Pendant, Host
Communication

EIA-RS232C, SECS I/II

Parallel I/O, SEMI E23-96, IEEE-TT

Lot ID Reader OptionsRFID
CleanlinessISO Class 1

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Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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2220 O’Toole Avenue, San Jose, CA 95131

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