This mechanical arm is designed for material handling in high-cleanliness environments, employing a closed-loop servo control system and is suitable for high-speed transportation.

Optional pseudo-horizontal multi-joint motion corresponding to parallel equipment layout.

Carrying capacity: Below 3Kg at the third joint of the arm.

Compatible with various types of Forks to meet the wafer transfer needs for different jobs.

Wafer securing methods: Vacuum suction type / Clamping type / Clamping and lifting type / Contact Bernoulli type / Non-contact Bernoulli type.

Based on the equipment layout, you can choose either an upper or lower fixing method.