Carrying capacity: Below 3Kg at the third joint of the arm.
The arm section is coated with Teflon to ensure corrosion resistance.
O-ring seals are used at component joint interfaces.
The waterproof structure of the Z-axis utilizes an accordion-style bellows.
Wafer fixing methods: Vacuum suction type / Clamping type.
| Handling Items | 3/4/6/8/12 inch wafers | ||
| Movable Range (Arm Travel Distance) | Arm | Theta Rotation | Lifting: |
|
290/376mm |
340° |
300/400/500 | |
| Transfer Speed （Average Speed） | 750mm/S |
235°/S |
500mm/S |
| Arm Type | Single Arm | ||
| Handling Height | 780--980mm | ||
| Repeatability Accuracy | Within ±0.1mm | ||
| Communication Protocol | HEX/ASCII | ||
| Communication Method | EtherNet/RS232 | ||
| Cleanliness | Highest ISO Class 1 | ||
| Facility Requirements |
Power: 220V, 10A Vacuum: -70~-90Kpa Positive Pressure: 0.1~0.5Mpa |
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
Copyright © FORTREND. Any commercial promotion of goods or services, whether directly or indirectly to consumers on this website, is considered 'advertising' (excluding product-related information such as packaging, specifications, and after-sales support)
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