Adopting a single-arm construction, it can achieve high-speed transfer of wafers.
Adopting a single Z-axis lifting structure, it is possible to achieve rapid lifting and lowering of the main body.
Carrying capacity: Below 4Kg at the third joint of the arm.
Capable of being paired with various types of custom forks to meet the transportation needs of different specifications of Cassette/reagent boxes.
Fixed Method: Clamping Type.
Fixed methods can be chosen either from the top or bottom based on the equipment layout.
Handling Items | 3/4/6/8/Cassette/Suitable Size Reagent Box | ||
Movable Range (Arm Travel Distance) | Arm | Theta Rotation | Lifting: |
290/376mm |
340° |
300/400/500 | |
Transfer Speed (Average Speed) | 750mm/S |
235°/S |
500mm/S |
Arm Type | Single Arm | ||
Handling Height | Configuration dependent | ||
Repeatability Accuracy | Within ±0.1mm | ||
Communication Protocol | HEX/ASCII | ||
Communication Method | EtherNet/RS232 | ||
Cleanliness | Highest ISO Class 1 | ||
Facility Requirements |
Power: 220V, 10A Vacuum: -70~-90Kpa Positive Pressure: 0.1~0.5Mpa |
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