Easy to Integrate
The fully automatic Fortrend Plus 500C model transfers 200mm cassettes from SMIF pods onto process stages in 90 seconds or less. The system can also be used to load cassettes into process tools in a non-SMIF environment.
With a total footprint not much larger than a SMIF pod, the Plus 500 Cx-X is easy to integrate with AGV system and into small areas.
A programmable robotic arm and end effector that can tilts 90˚ and do extra 85mm lateral movements supporta wide variety of process tools that cannot be used with standard models.
With 1507mm height, PLUS 500 Cx-X can connect to process tool without blocking operation panel or monitor screen right above the load lock.

Simple to Maintain
All Plus 500 models feature a variety of tool interface options: diamond-pin interface plate with quick-release latches and stand-alone floor mount enabling reconnection to and from virtually any process tool within 15 minutes or less. Considering that during ramp-up a pod loader may be disconnected and reconnected as often as twice a day to adjust the process tooling, this feature significantly reduces downtime and simplifies preventive maintenance.