.png)
.png)
Wafer Protrusion Sensor
Pod Present Sensor
Wafer Mapping Sensor (Present, Cross Slot)
SEMI E19.4, S2 and S8 standards and CE certified
Mounts directly to existing ASM SMIF Mount
Teach Pendant
Optional Universal Floor Mount.
Optional RFID reader/writer
| POD/Wafer Size | 200 mm |
| Overall, Height | 710mm W x 660mm D x 1770mm H |
| Robot arm payload | 8 KG |
| Weight | 185 KG(Depends on configuration) |
| Rated voltage | AC 220V |
| Rated power | 2200W |
| The main material | Aluminum alloy, stainless steel (SUS 304) |
| Noise level | < 75 dBA |
| Communication |
EIA-RS232C,SECS I/II Parallel I/O,SEMI E23-96, IEEE-TTL |
| Communication protocol | ASCII、TCP/P、ASCII、TCP/P |
| Optional options | iD read/write device with RFID module or IR Link |
| Cleanliness | ISO Class 2 |
| Pod Interface | SEMIE19.4 |
| Throughput | 70 sec load & 90sec unload |
| Working Temperature | 0 ~ 40ºC |
| Working Humidity | 5% ~ 90% |
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
Copyright © FORTREND. Any commercial promotion of goods or services, whether directly or indirectly to consumers on this website, is considered 'advertising' (excluding product-related information such as packaging, specifications, and after-sales support)
.jpg)
二工位产品中心白底图1420x750.jpg)
.jpg)
