150mm Compact Semiconductor SMIF | Efficient Wafer Handling Solutions

PLUS 150CX-X

Optimized for Integration Efficiency

The Fortrend Plus 150CX-X executes fully automated 150mm cassette transfers from SMIF pods to process stages in 90 seconds or less, compatible with both SMIF and open environments. Maintaining a footprint equivalent to standard SMIF pods, the system integrates directly with AGV/OHT systems in space-restricted areas. The programmable robotic arm with 240mm lateral-shift end effector enables access through narrow chamber entrances for precise cassette placement in large process chambers, validating Fortrend's precision engineering in semiconductor automation.

Streamlined Maintenance Design

All Plus 150 models implement diamond-pin interfaces with quick-release latches and universal floor mounts, allowing reconnection to any process tool within 15 minutes. This capability reduces downtime during daily tooling adjustments while simplifying preventive maintenance procedures. The open-frame architecture provides immediate visual access to core components, further minimizing service interruptions.

Safe and Reliable
A patented, built-in mini-environment and airflow control system help protect wafers from contamination, while the robot is transferring pod between SMIF pods and tool stages.
With many fail-safe features including pod present sensor, wafer protrusion sensor,cassette overload sensors, constant toque dc stepper motors (with encoder feedbacks) for accurate and reliable motion controls, the Plus 500 Cx-X is the best choice for both OEMs and system integrators.

Outstanding Support
Installation, on-site training, worldwide supports and variety choices of economical long-term maintenance contracts are available from Fortrend.
Established in 1979, Fortrend’s expertise in robotics, mechanics and software provide the optimum solution for semiconductor manufacturers who are driven to improve yield, increase throughput and reduce costs.

Product Specifications

MODEL	PLUS 150CL-L	PLUS 150CR-R	PLUS 150CL-L-OHT	PLUS 150CR-R-OHT
I/O Panel	Left	Right	Left	Right
E84 COMM Board	NO	NO	YES	YES
Dimensions	34.8cm(W)x49.8cm(D)x152cm(H)
Wheel Height	6 to 15.3 cm tool dependent
Cycle Time (Load)	<80 sec.(S Model without tilt and leave pod open after load)
Cycle Time (Unload)	<80 sec.(S Model without tilt and leave pod open after load)
Arm Extension	390mm	Arm Z Travel	135mm	Transit	80mm
Power	100 to 240 VAC @ 50/60 Hz	Weight	93 Kg (not including SMIF pod
Power-on Reset time	<20 Secs	SMIF Arm Payload	3.2 Kg
Arm Extent Axis Precision	±0.1 mm	Arm Elevator Axis Precision	±0.1 mm
Gripper Axis Precision	±0.5 mm	Tilt Axis Precisio	±0.15 degree
Control	Manual (Front Panel); Remote (From OEM Tool or CIM); Pendant
Communication Interface	RS232 (Serial) – Fortrend HEX or ASCII or SECS Parallel I/O
Lot ID Reader Options	IR (Smart) Tag – 8200 or 8400 series RFID Read/write Module – Fortrend or Hermos or Other RFID Intellion Lot Track system

Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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