Options:
Optical PIO sensor
Info Pad sensor
N2 puege interface
200mm adaptor
200mm wafer mapping
200mm wafer casstte RFID Reader/Writer
| Equipment specification |
Equipment Size |
H 1349 mm * W 472 mm * L 586mm | |
| Equipment weight | 66 kg ± 0.5 kg（It varies depending on the configuration) | ||
| Rated voltage | DC 24 V | ||
| Rated current | 6 A | ||
| Rated power | 144W | ||
| Communication mode | Serial RS-232C, parallel I/0 | ||
| Communication protocol | HEX、ASCII | ||
| Work specification | Carrier size | SEMI compliant 300 mm/200 mm(optional) FOUP | |
| Load height | 900 mm ± 10 mm | ||
| Action cycle time | FOUP open | 11 sec（ with mapping ） | |
| FOUP close | 8 sec（ without mapping ） | ||
| Factory needs | CDA | 0.5 ~ 0.6 MPa ( Ø 6 air tube ) | |
| VAC | < - 80 kPa ( Ø 6 air tube ) | ||
| N2 (optional) | 0.1 ~ 0.2 MPa ( Ø 8 air tube ) | ||
| Optional component | N2 Purge Function | ||
| AMHS Communication Por（t E84） | |||
| 200mm cassette adaptor | |||
| Mechanical/electronic-Info Pad（acquiesce） | |||
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
Copyright © FORTREND. Any commercial promotion of goods or services, whether directly or indirectly to consumers on this website, is considered 'advertising' (excluding product-related information such as packaging, specifications, and after-sales support)
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