The original factory is equipped with a MAPPING system, compatible with 150/200mm wafers, can detect problems such as stacks, oblique films, and eliminate risk of collision.
A variety of customized components that can be used to deal with different working conditions on the scene, such as:Do you need to connect to the car.
Pod/WAFER size |
150/200 mm(SMIF |
Size |
491mm W x 468mm D x 815mm H |
Weight |
40 Kg(Depends on configuration) |
Rated voltage |
DC 24 |
Rated power |
120W |
The main materia | Aluminum alloy, stainless steel (SUS 304) |
Noise level |
< 60 dBA |
Communication |
Serial EIA-RS232C, Parallel I/O |
Communication protocol |
HEX、SECS |
Cleanliness |
Class 1@0.1μm |
Options |
The ID read and write device is equipped with an RFID module or Irlink |
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