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PLM is a relatively mature box. It is equipped with a sensor compatible with 6 -inch and 8 -inch wafer box to detect it. It can accurately detect the round state of the POD box. PLM can be connected with a variety of devices, and the rich feature options provide more solutions for the client's production line upgrade.
The standard PLM-200W-OHT device is fully in line with SEMI standards and has high-throughability and compatibility.

The original factory is equipped with a MAPPING system, compatible with 150/200mm wafers, can detect problems such as stacks, oblique films, and eliminate risk of collision.

A variety of customized components that can be used to deal with different working conditions on the scene, such as:Do you need to connect to the car.

Product Specifications
Pod/WAFER size

150/200 mm(SMIF

Size

491mm W x 468mm D x 815mm H

Weight

40 Kg(Depends on configuration)

Rated voltage

DC 24

Rated power

120W

The main materia Aluminum alloy, stainless steel (SUS 304)
Noise level

< 60 dBA

Communication

Serial EIA-RS232C, Parallel I/O

Communication
protocol

HEX、SECS

Cleanliness

Class 1@0.1μm

Options

The ID read and write device is equipped with an RFID module or Irlink


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