Fortrend PLM-200W is a simple, reliable pod opener designed to open 200mm SMlF pods by lifting thepod lid. Wafers remain in a sealed micro-environment where they can be accessed by a process tool'srobot. Active airflow keeps the sealed micro-environment in better than lSO class-1 cleanlinessDesigned for quick installation and removal the PLM interfaces easily with most semiconductor toolsAn integrated wafer protrusion sensor and provisions for tool interlock signals further prevent the poccover from closing on protruding wafers. Active pod present sensor and pod base/cover stictiondetection algorithm detect the presence of the SMlF pod and faulty SMlF pods prevent mistaken podoperations assures optimal performance of the tools. Optional E84 COMM Board for E84 Handshake isOEM tool does not have the capabilities.