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PLM EUV Dual

lISO Class 1 cleanliness with active self-clean air flow design.

lAutomatic unlocks and locks SMIF outer pod door

lLifts both inner and outer pod doors.

lApplies 80N force to Outer Pod door, per SEMI E152, during Unlocking and Locking of the Outer Pod door.

lAll electrical system with field programmable application software


lFour programmable Interlock signals

lInner pod Present Sensor

lInner pod alignment sensors

lInfo Pad sensors detect Pod Type - RSP 200 or EUV Pod

lCommunication: Serial or Parallel, SECS optional.

lMeets SEMI E19.4, E84, E100, E117, E152, S2 and S8 standards and CE certified

lOHT Compatible

lOptional RFID reader/writer

lOptional Purge Available

lUnlock/Locks Standard 200mm SEMI E100 Reticle SMIF Pods (RSP)


Product Specifications
Size 150mm W x 150mm D x  6.35mm H
Dimension 363W x 420D x 700H mm
240 mm
Load Capacity 5.4kg
Pod Types

SEMI E152 RSP or E100

RSP

SEMI E19.4
100V/240VAC @ 1Amp  50/60Hz  Or 24 VDC (Option)
Weight 24kg without Pod
< 5 seconds
< 5 seconds
50,000 cycles
< 1 hour
Pod PIP sensor 1 set
Parallel/ Serial,EIA-RS232C(SECS I/II)




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Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.

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