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● ISO Class 1 cleanliness with active self-clean air flow design.
● Automatic unlocks and locks SMIF outer pod door
● Lifts both inner and outer pod doors.
● Applies 80N force to Outer Pod door, per SEMI E152, during Unlocking and Locking of the Outer Pod door.
● All electrical system with field programmable application software
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● Four programmable Interlock signals
● Inner pod Present Sensor
● Inner pod alignment sensors
● Info Pad sensors detect Pod Type - RSP 200 or EUV Pod
● Communication: Serial or Parallel, SECS optional.
● Meets SEMI E19.4, E84, E100, E117, E152, S2 and S8 standards and CE certified
● OHT Compatible
● Optional RFID reader/writer
● Optional Purge Available
● Unlock/Locks Standard 200mm SEMI E100 Reticle SMIF Pods (RSP)
| Size | 150mm W x 150mm D x 6.35mm H |
| Dimension | 363W x 420D x 700H mm |
| 240 mm | |
| Load Capacity | 5.4kg |
| Pod Types |
SEMI E152 RSP or E100 RSP |
| SEMI E19.4 | |
| 100V/240VAC @ 1Amp 50/60Hz Or 24 VDC (Option) | |
| Weight | 24kg without Pod |
| < 5 seconds | |
| < 5 seconds | |
| 50,000 cycles | |
| < 1 hour | |
| Pod PIP sensor | 1 set |
| Parallel/ Serial,EIA-RS232C(SECS I/II) |
Disclaimer: The appearance, specifications, performance descriptions, comparative data, and other information regarding the products displayed on this website are based on internal testing and experiments conducted in FORTREND’s laboratory. This information is for reference purposes only, and the final product may vary.
Copyright © FORTREND. Any commercial promotion of goods or services, whether directly or indirectly to consumers on this website, is considered 'advertising' (excluding product-related information such as packaging, specifications, and after-sales support)
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