PLM 200Rx

Small footprint saves valuable FAB floor space
ISO Class 1 cleanliness with active self-clean air flow design.
Opens Standard E100 RSP and EUV E152 Outer Pods Door
Lifts the Pod shell leaving the Reticles in a sealed mini environment
Applies 80N Force to E152 Pod doors during opening and Closing.
Info Pad Sensor to detect Pod Type
All electrical system with field programmable application software
OHT Compatible
Reticle Present Sensor (E100 SMIF Pods)
Inner Pod Present Sensor (E152 EUV SMIF Pods)
Pellicle Present and Orientation sensor (for E100 SMIF Pods)
Meets SEMI E19.4, E100, E152, E117, S2 and S8 standards and CE certified
Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.
Optional RFID reader/writer