● Small footprint saves valuable FAB floor space

● ISO Class 1 cleanliness with active self-clean air flow design

● Supports Multiple and Single SMIF 150 pods

● Lifts the Pod shell leaving the Reticles in a sealed mini-environment

● All electrical system with field programmable application software

● Four programmable Interlock signals

● Pod Present Sensors

● Mask Mapping Sensor

● Protrusion sensor

● OHT Compatible

● Meets SEMI E19.3, E111, E112, E117, S2 and S8 standards and CE certified

● Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.

● Optional version with integral RFID reader/writer