ISO Class 1 cleanliness with active self-clean air flow design.//Supports Multiple and Single SMIF 150 pods//Lifts the Pod shell leaving the Reticles in a sealed mini-environment//All electrical system with field programmable application software//Four programmable Interlock signals//Pod Present，Mask Mapping，Protrusion sensor//OHT Compatible//Mounts directly into a process Tool or to a manual load port adaptor to convert open station to a SMIF compatible station.//Optional version with integral RFID reader/writer