EFEM FOR SEMICONDUCTOR EQUIPMENT

The Equipment Front End Module (EFEM) is a crucial component in semiconductor manufacturing. It ensures cleanliness requirements through a controlled microenvironment, enabling automated loading and unloading of wafers. It connects the front-end and back-end logistics, facilitating material transfer, equipment control, and process coordination.

IN-DEPTH ANALYSIS OF WAFER ROBOTS

As the demand for semiconductors continues to grow across various industries such as consumer electronics, automotive, telecommunications, and healthcare, semiconductor production capacity and quality have become critical factors influencing industry competitiveness. In the evolution of semiconductor equipment towards higher efficiency, precision, and automation, wafer handling robots (ROBOT) play a vital role. This specialized equipment not only enhances production efficiency but also ensures the safety and accuracy of wafers during handling, making it a key component in achieving efficient and high-quality production.

WAFER STANDARD MECHANICAL INTERFACE (SMIF) ISOLATION TECHNOLOGY

As is well known, traditional wafers need to be produced and transported under relatively enclosed and dust-free conditions. Usually, the production equipment is placed in a high-cleanliness room that meets the requirements for wafer production. With the

SMIF LOAD PORT SOLUTIONS

AMAT Endura Wide Body 2x PLUS 500SAMAT Verity 2x PLUS 500Sx with Mini-EnvironmentAMAT Centura Wide Body 2x PLUS 500SAMAT Centura Narrow Body 2x PLUS 500R