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300mm EFEM Home>Products> Robot & EFEM System 
 
Standard 300mm EFEM
 

Standard 300mm  EFEM System


Fortrend offer Standard 300 EFEM to integrate with process tool or inspection tool.
The process tool maker or inspection tool maker focuse on prcess development or measurement. Fortrend focus on automation and system integration. 
Utilize both resource efficiently, which make both company more comptencey.

For non-standard EFEM system, Fortrend can offer customized system to match the customer rquirement.

EFEM configuration

Standard EFEM Specification



 
 
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