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Robot Home>Products> Robot & EFEM System 
 
LED Wafer Robot - Single Arm - RW-SA-1110

            
   
         LED Wafer  Robot RW-SA-1110 


Contents
No.
Detail contents
Specification
Performance
1-1
Range of Motion
Extension (R-axis)
500 mm
Rotation (Θ axis)
330 deg
Up/Down (Z axis)
200 mm
1-2
Maximum Speed
R axis
640 mm/sec
Θ axis
180 deg/sec
Z axis
240 mm/sec
1-3
Repeatable Accuracy
R axis
Less than 0.1mm
Θ axis
Less than 0.1deg
Z axis
Less than 0.1 mm
1-4
Min. Diameter of Rotation
460 mm
1-5
MTBF(Mean Time between Failure)
≥ 5,000 hrs
1-6
MTTR(mean Time To Repair)
≤ 2 hrs
Certification
2-1
Noise Generation
≤ 70 dB
2-2
Cleanliness
ISO class 3
2-3
Insulation Voltage
AC1500V for 1 minute
2-4
Insulation Resistance
≥ 1㏁(DC500V)
Material
2-1
Robot Body Material
Anodized Aluminum (8±2 ㎛)
SUS304
2-2
Blade Material
Blade : Ceramic 2.5mm
Facility
3-1
Power(Controller)
SINGLE PHASE AC220V
±10%, 10A  
3-2
Air Supply
More than 0.4~ 0.5MPa , Φ 4mm
3-3
Vacuum Supply
Less than -50 kPa
3-4
Suction Flow Rate
Max. 50 ℓ/min
Other
4-1
Weight
Approx. 18 kgf
4-1
Payload
0.2 kg
Option
5-1
End-Effector Grip Type
Vacuum
5-1
Wafer mapping
Laser Sensor

 



 
 
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