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Robot Home>Products> Robot & EFEM System 
 
300mm Dual Arm Robot RW-SA-1320

  

Item

Specification

Wafer Size

200/300mm
Motion Range R1, R2 Axis Stroke 560mm
T-Axis 330°
Z-Axis 300mm
Speed R1, R2 Axis 800mm/s
T-Axis 240°/s
Z-Axis 500mm/s
Reliability R1, R2 Axis ±0.1mm
T-Axis ±0.02°
Z-Axis ±0.1mm

Mini Rotation Diameter

Ø520mm

Payload

1 kg

Cleanliness

class 1

Weight

≈38kg
 
 
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