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300mm Wafer Sorter Home>Products> Wafer Sorter System 
 
300mm Wafer Sorter

300mm Wafer Sorter


Features

  • 300mm wafers transfers
  • Class 1 environment with integrated ionizers
  • Compact footprint with field proven chassis design
  • Simple graphic user interface with touch screen
  • SECS/GEM capabilities
  • Reliable performance using Fortrend field proven load port and robot
  • Wafer alignement and notch finding
  • Support 200mm wafers (optional)
  • Support Ultra-Thin wafer(optional)
  • Wafer ID (OCR) reading, support bottom side(optioal)
  • RFID/Smart Tag/Barcode support(optional)
  • Support None Touch End Effectors(optional)

Specification

Size (W  x D x H)  mm x mm x mm
Wafer Size SEMI standard 300mm wafers, support 200mm wafers(optional)
Cleanness Class 1 @ 0.1um (PTFE)
Throughput 500 WPH (Without OCR and Aligner)
250 WPH (With OCR and Aligner)
End-Effector Vacuum blade or optional edge gripper or none touch end effectors
Robot Repeatability ± 0.1mm
Aligner Repeatability ± 0.1mm
Communication SECS I/HSMS and SECS II
MTTR < 2 hours
MTBF > 8,000 hours
Wafer Breakage rate < 10 per 1,000,000 wafers
OS Window XP Professional
Power Requirement 220V, 50/60Hz, 10A, 3 Wires, 1 phase


Dimension







 
 
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