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ICCI Controller Home>Products> ICCI Products - Furnace Control Systems 
 
ICCI Controller

        ICCI SLC-99 Controllers

    To replace obsolete controllers:

  • Diffusion Furnaces (Bruce, TEL, Thermco, Tempress, Tystar, etc.) 
  • Gasonics Hypox Systems
  • ASM and Pacific Western Plasma CVD Systems 

       Controller Functionality:

  • 1 to 99 Steps per recipe
  • Allowable Exit Conditions for Each Step
  • 3 or 5 Independent Temperature Control Loops
  • 16 Valve Outputs
  • 8 Analog (MFC, Pressure Control, etc.) Loops
  • Step Redirect
  • Boat Loader Control

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