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The Extended Little Green Furnace (ELGF) Home>Products> ICCI Products - Furnace Control Systems 
 
The Extended Little Green Furnace “ELGF”

The ELGF is the big brother of the LGF. It has a 20” flat zone and is equipped

with a conventional load station and gas cabinet.

The Extended Little Green Furnace can be configured of wafer sizes up to 8”.

3-stack versions are also available. The unit below was configured for

LPCVD with in-situ plasma cleaning capability.

ELGF  

 
 
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