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PIS-200: 200mm Indexer Home>Products> 200mm Wafer SMIF  
 
PIS-200

  • 200mm SMIF Pod Opener
  • Move cassette vertically
  • Small footprint saves valuable fab floor space
  • Integrated wafer mapper
  • Wafer / cassette sensor to prevent wafer breakage
  • Wafer auto position
 
 
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