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200mm SMIF Pod Openers for OEM Applications Home>Products> 200mm Wafer SMIF  
 
POM-200 / POS-200 Table Top Stand-alone SMIF Pod Opener

  • Fortrend POM-200/POS-200 is a simple, reliable pod opener designed to open 200mm SMIF pods by lifting the shell.  After Pod Shell lift, operation can move entire cassette out or pick wafer out by gripper.
  • Untra compact design and can almost be placed on any table.
  • An optional wafer mapper allows additional functionalities as required by special application.
  • An integrated wafer/reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding wafers/Reticles. 
  • Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools
  • Communication: Parallel, Series
        • Optional SECS/GEM
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