PLM 200UL is samiliar to PLM 200 but different in Pod Opener Table. Its Pod Opener table is ultra thin to suit for more tools.
PLM 200UL can directly mounts onto a process Tool or to a manual loadport adaptor to convert open station to a SMIF compatible station.
Fortrend PLM-200UL is a simple, reliable pod opener designed to open 200mm SMIF pods by lifting the shell.
Wafer or Reticles remain in a sealed micro-environment where they can be accessed by a process tool’s robot. Active airflow keeps the sealed micro-environment in better than class-1 cleanliness.
Designed for quick installation and removal the PLM interfaces easily with most semiconductor tools.
An optional reticle mapper protects against breakage during reticle handling operations.
An integrated wafer/reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding wafers/Reticles.
Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools
