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200mm SMIF Pod Openers for OEM Applications Home>Products> 200mm Wafer SMIF  
PLM-200UL 200mm Wafer SMIF Ultra Low Pod Opener

  • PLM 200UL is samiliar to PLM 200 but different in Pod Opener Table. Its Pod Opener table is ultra thin to suit for more tools.
  • PLM 200UL can directly mounts onto a process Tool or to a manual loadport adaptor to convert open station to a SMIF compatible station.
  • Fortrend PLM-200UL is a simple, reliable pod opener designed to open 200mm SMIF pods by lifting the shell. 
  • Wafer or Reticles remain in a sealed micro-environment where they can be accessed by a process tool’s robot. Active airflow keeps the sealed micro-environment in better than class-1 cleanliness.
  • Designed for quick installation and removal the PLM interfaces easily with most semiconductor tools.
  • An optional reticle mapper protects against breakage during reticle handling operations.
  • An integrated wafer/reticle protrusion sensor and provisions for tool interlock signals further prevent the pod cover from closing on protruding wafers/Reticles. 
  • Active pod present sensor and pod base/cover sticktion detection algorithm detect the presence of the SMIF pod and faulty SMIF pods prevent mistaken pod operations assures optimal performance of the tools

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